论文信息 - Electrical and optical properties of nanosized films of doped zinc and indium oxides deposited by RF magnetron sputtering at room temperature - 字舞流文

Electrical and optical properties of nanosized films of doped zinc and indium oxides deposited by RF magnetron sputtering at room temperature

K. Zelentsov | D. Kudryashov | D. Sosnin | S. A. Gudovskikh

[1] Firoz Khan,et al. Effective passivation of silicon surface by AZO films: Application in bifacial solar cells , 2013 .

[2] C. Tseng,et al. Improved performance mechanism of III–V compound triple-junction solar cell using hybrid electrode structure , 2013 .

[3] H. Kim,et al. Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure , 2011 .

[4] Yusuf Selamet,et al. High quality ITO thin films grown by dc and RF sputtering without oxygen , 2010 .

[5] Zhenyu Sun,et al. Growth of ZnO:Al films by RF sputtering at room temperature for solar cell applications , 2009 .

[6] Gong Zhang,et al. Properties of transparent conductive ZnO: Al thin films prepared by magnetron sputtering , 2004, Microelectron. J..

[7] M. Hon,et al. Studying of transparent conductive ZnO : Al thin films by RF reactive magnetron sputtering , 2000 .

[8] Alberto Piqué,et al. Electrical, optical, and structural properties of indium–tin–oxide thin films for organic light-emitting devices , 1999 .