Synthesis of Tungsten Oxide (WO3) Film on Glass Substrate Using Aqueous Based Solution Spray Deposition Method

A Tungsten oxide (WO3) film on top of a glass substrate had been successfully constructed. The immobilization of tungsten oxide was performed using spray-deposition method. The precursor volume was varied as 5 mL, 10 mL and 25 mL. Characterization using XRD and SEM yield that precursor volume influence the quality of the film. It was found that the good uniform film was obtained using precursor volume 5 mL and 10 mL. The crack which was resulted from non-uniformity of the film appear when the precursor film was 25 mL.