Wafer Fabrication: Factory Performance and Analysis

About the authors. Preface. 1. Introduction to the Electronic Industry. 2. Factory Phenomena. 3. Processes for Wafer Fabrication. 4. Fab Graphs and Static Analyses. 5. Factory Performance Basics. 6. Advanced Performance Concepts. 7. Factory Modeling. 8. Cluster Tools. 9. Performance Economics. Index.