A KOVEL BBD STRUCTERE FOR LOW VOLTAGE OPERATIOX
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A new MOS BBD which can operate at extremely low voltage has been realized. A novel pentode MOS structure, having three overlapping gates, has been developed by introducing double poly-Silicon process. Making potential gradient along the channel length and excluding the stray capacitance, high transconductanc e and low channel length modulation are simultaneously obtained, and as a result, the transfer inefficiency is decreased. Consequently, the transfer inefficiency of 2x10-5 has been obtained even at 1.5V supply and 40kHz clock.