R&D of high resolution rotary table based on the ultrasonic standing waves
暂无分享,去创建一个
Ramutis Bansevicius | Genadijus Kulvietis | Algimantas Bubulis | I. Grybas | V. Jūrėnas | J. Janutėnaitė
[1] Hwa Soo Kim,et al. Design and modeling of a novel 3-DOF precision micro-stage , 2009 .
[2] Minyue Fu,et al. Design and Control of a Rotary Dual-Stage Actuator Positioning System ✩ , 2011 .
[3] Y. S. Tarng,et al. Precision nano-alignment system using machine vision with motion controlled by piezoelectric motor , 2008 .
[4] Yoshikazu Arai,et al. A linear-rotary stage for precision positioning , 2010 .