Fabrication of complex multilevel microchannels in PDMS by using three-dimensional photoresist masters.

This paper demonstrates a new method of implementing complex microchannels in PDMS, which is simply constructed using three-dimensional photoresist structures as a master mold for the PDMS replica process. The process utilizes UV-insensitive LOR resist as a sacrificial layer to levitate the structural photoresist. In addition, the thickness of photoresist structures can be controlled by multi-step UV exposure. By using these techniques, various three-dimensional photoresist structures were successfully implemented, including the recessed cantilevers, suspended bridges, and the complex plates with micro-pits or micro-villi. We demonstrate that the three-dimensional photoresist structures are applicable to implementing complex multiple microchannels in PDMS by using the PDMS replica method.

[1]  G. Whitesides,et al.  Poly(dimethylsiloxane) as a material for fabricating microfluidic devices. , 2002, Accounts of chemical research.

[2]  Jeung Sang Go,et al.  A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[3]  Axel Scherer,et al.  Microfluidic vias enable nested bioarrays and autoregulatory devices in Newtonian fluids , 2006, Proceedings of the National Academy of Sciences.

[4]  B. Chung,et al.  Human neural stem cell growth and differentiation in a gradient-generating microfluidic device. , 2005, Lab on a chip.

[5]  Brian N. Johnson,et al.  An integrated nanoliter DNA analysis device. , 1998, Science.

[6]  G. Whitesides,et al.  Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their actuation by electro-osmotic flow , 1999 .

[7]  D. Beebe,et al.  Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer , 2000, Journal of Microelectromechanical Systems.

[8]  Noo Li Jeon,et al.  Patterned cell culture inside microfluidic devices. , 2005, Lab on a chip.

[9]  宁北芳,et al.  疟原虫var基因转换速率变化导致抗原变异[英]／Paul H, Robert P, Christodoulou Z, et al//Proc Natl Acad Sci U S A , 2005 .

[10]  Francis E. H. Tay,et al.  A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels , 2001 .

[11]  Y. Huang,et al.  Anti-inflammatory properties of triblock siloxane copolymer-blended materials. , 1999, Biomaterials.

[12]  R. Misra,et al.  Biomaterials , 2008 .

[13]  B. Krauskopf,et al.  Proc of SPIE , 2003 .

[14]  大房 健.  基礎講座 電気泳動(Electrophoresis) , 2005 .

[15]  G. Whitesides,et al.  Microfluidic devices fabricated in Poly(dimethylsiloxane) for biological studies , 2003, Electrophoresis.

[16]  Kwang-Seok Yun,et al.  A microfluidic chip for measurement of biomolecules using a microbead-based quantum dot fluorescence assay , 2006 .

[17]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[18]  Hongkai Wu,et al.  Fabrication of complex three-dimensional microchannel systems in PDMS. , 2003, Journal of the American Chemical Society.

[19]  Euisik Yoon,et al.  Multilevel microstructure fabrication using single-step 3D photolithography and single-step electroplating , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[20]  G M Whitesides,et al.  Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping. , 2000, Analytical chemistry.

[21]  T. Merkel,et al.  Gas sorption, diffusion, and permeation in poly(dimethylsiloxane) , 2000 .

[22]  Jin Ho Kim,et al.  Surface modification of poly(dimethylsiloxane) microchannels , 2003, Electrophoresis.

[23]  M. Rosdy,et al.  Proliferation of normal human keratinocytes on silicone substrates. , 1991, Biomaterials.