A MEMS Condenser Microphone-Based Intracochlear Acoustic Receiver

Goal: Intracochlear sound pressure (ICSP) measurements are limited by the small dimensions of the human inner ear and the requirements imposed by the liquid medium. A robust intracochlear acoustic receiver (ICAR) for repeated use with a simple data acquisition system that provides the required high sensitivity and small dimensions does not yet exist. The work described in this report aims to fill this gap and presents a new microelectromechanical systems (MEMS) condenser microphone (CMIC)-based ICAR concept suitable for ICSP measurements in human temporal bones. Methods: The ICAR head consisted of a passive protective diaphragm (PD) sealing the MEMS CMIC against the liquid medium, enabling insertion into the inner ear. The components of the MEMS CMIC-based ICAR were expressed by a lumped element model (LEM) and compared to the performance of successfully fabricated ICARs. Results: Good agreement was achieved between the LEM and the measurements with different sizes of the PD. The ICSP measurements in a human cadaver temporal bone yielded data in agreement with the literature. Conclusion: Our results confirm that the presented MEMS CMIC-based ICAR is a promising technology for measuring ICSP in human temporal bones in the audible frequency range. Significance: A sensor for evaluation of the biomechanical hearing process by quantification of ICSP is presented. The concept has potential as an acoustic receiver in totally implantable cochlear implants.

[1]  Jae Hoon Sim,et al.  Objective Assessment of Stapedotomy Surgery From Round Window Motion Measurement , 2012, Ear and hearing.

[2]  Wouter Olthuis,et al.  Fabrication of silicon condenser microphones using single wafer technology , 1992 .

[3]  Peter J. Henning,et al.  MEMS condenser microphone , 2000 .

[4]  John J. Rosowski,et al.  Differential Intracochlear Sound Pressure Measurements in Normal Human Temporal Bones , 2009, Journal of the Association for Research in Otolaryngology.

[5]  P Avan,et al.  Direct evidence of cubic difference tone propagation by intracochlear acoustic pressure measurements in the guinea‐pig , 1998, The European journal of neuroscience.

[6]  Jae Hoon Sim,et al.  Complex Stapes Motions in Human Ears , 2010, Journal of the Association for Research in Otolaryngology.

[7]  V. Nedzelnitsky,et al.  Sound pressures in the basal turn of the cat cochlea. , 1980, The Journal of the Acoustical Society of America.

[8]  Rahel Gerig.  Middle-ear sound transmission , 2015 .

[9]  M. Zrunek,et al.  Dimensions of the scala tympani in relation to the diameters of multichannel electrodes , 2007, Archives of oto-rhino-laryngology.

[10]  James H. Smith,et al.  Micromachined pressure sensors: review and recent developments , 1997, Smart Structures.

[11]  Bin Liu,et al.  A new measurement microphone based on MEMS technology , 2003 .

[12]  Rongming Lin,et al.  Modeling and characterization of a silicon condenser microphone , 2004 .

[13]  S. Merchant,et al.  Testing a Method for Quantifying the Output of Implantable Middle Ear Hearing Devices , 2007, Audiology and Neurotology.

[14]  Daniel J Tollin,et al.  Effects of Skin Thickness on Cochlear Input Signal Using Transcutaneous Bone Conduction Implants , 2015, Otology & neurotology : official publication of the American Otological Society, American Neurotology Society [and] European Academy of Otology and Neurotology.

[15]  Albrecht Eiber,et al.  The Effects of Complex Stapes Motion on the Response of the Cochlea , 2008, Otology & neurotology : official publication of the American Otological Society, American Neurotology Society [and] European Academy of Otology and Neurotology.

[16]  W. T. Peake,et al.  Sound-pressure measurements in the cochlear vestibule of human-cadaver ears. , 1997, The Journal of the Acoustical Society of America.

[17]  Werner Karl Schomburg,et al.  Introduction to Microsystem Design , 2011 .

[18]  A. Dancer,et al.  Intracochlear sound pressure measurements in guinea pigs , 1980, Hearing Research.

[19]  Gary W. Elko,et al.  A History of Consumer Microphones: The Electret Condenser Microphone Meets Micro-Electro-Mechanical-Systems , 2009 .

[20]  Wouter Olthuis,et al.  Modelling of silicon condenser microphones , 1994 .

[21]  Elizabeth S. Olson,et al.  A family of fiber-optic based pressure sensors for intracochlear measurements , 2015, Photonics West - Biomedical Optics.

[22]  John J Rosowski,et al.  Sound pressure distribution and power flow within the gerbil ear canal from 100 Hz to 80 kHz. , 2007, The Journal of the Acoustical Society of America.

[23]  Pio G. Iovenitti,et al.  Modelling and Optimisation of a Spring-Supported Diaphragm Capacitive MEMS Microphone , 2010 .

[24]  J. H. Jerman.  The fabrication and use of micromachined corrugated silicon diaphragms , 1990 .

[25]  H. Tilmans.  Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems , 1996 .

[26]  Wouter Olthuis,et al.  A review of silicon microphones , 1994 .

[27]  Masakazu Iwaki,et al.  Silicon microphone with wide frequency range and high linearity , 2007 .

[28]  Paul Avan,et al.  Reverse middle-ear transfer function in the guinea pig measured with cubic difference tones , 1997, Hearing Research.

[29]  Balakumar Balachandran,et al.  Sensor diaphragm under initial tension: Linear analysis , 2005 .

[30]  Elizabeth S. Olson,et al.  Direct measurement of intra-cochlear pressure waves , 1999, Nature.

[31]  Józef Zwislocki-Mościcki,et al.  Theorie der Schneckenmechanik: qualitative und quantitative Analyse , 1948 .

[32]  Janusz Bryzek,et al.  Impact of MEMS technology on society , 1996 .

[33]  Sunil Puria,et al.  Human middle-ear sound transfer function and cochlear input impedance , 2001, Hearing Research.

[34]  M. Strasberg,et al.  Hydrophone Calibration in a Vibrating Column of Liquid , 1962 .

[35]  E. Olson,et al.  Observing middle and inner ear mechanics with novel intracochlear pressure sensors. , 1998, The Journal of the Acoustical Society of America.

[36]  Harri eACT ilmansy.  Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems , 1996 .