Active Hyperspectral Sensor Based on MEMS Fabry-Pérot Interferometer

An active hyperspectral sensor (AHS) was developed for target detection and classification applications. AHS measures light scattered from a target, illuminated by a broadband near-infrared supercontinuum (SC) light source. Spectral discrimination is based on a voltage-tunable MEMS Fabry-Pérot Interferometer (FPI). The broadband light is filtered by the FPI prior to transmitting, allowing for a high spectral-power density within the eye-safety limits. The approach also allows for a cost-efficient correction of the SC instability, employing a non-dispersive reference detector. A precision of 0.1% and long-term stability better than 0.5% were demonstrated in laboratory tests. The prototype was mounted on a car for field measurements. Several road types and objects were distinguished based on the spectral response of the sensor targeted in front of the car.

[1]  Raul Morais,et al.  Hyperspectral Imaging: A Review on UAV-Based Sensors, Data Processing and Applications for Agriculture and Forestry , 2017, Remote. Sens..

[2]  Melissa L. Nischan,et al.  Active spectral imaging , 2003 .

[3]  Chris Dyer,et al.  Active hyperspectral imaging system for the detection of liquids , 2008, SPIE Defense + Commercial Sensing.

[4]  Antti Näsilä,et al.  VTT’s Fabry-Perot interferometer technologies for hyperspectral imaging and mobile sensing applications , 2017, OPTO.

[5]  Guolan Lu,et al.  Medical hyperspectral imaging: a review , 2014, Journal of biomedical optics.

[6]  Rami Mannila,et al.  A continuously tunable NIR laser and its applications in material classification , 2018, Remote Sensing.

[7]  Bin Guo,et al.  MOEMS FPI sensors for NIR-MIR microspectrometer applications , 2016, SPIE OPTO.

[8]  Michael A. Powers,et al.  Spectral LADAR: active range-resolved three-dimensional imaging spectroscopy. , 2012, Applied optics.

[9]  Bo Zhu,et al.  Estimation of rice leaf nitrogen contents based on hyperspectral LIDAR , 2016, Int. J. Appl. Earth Obs. Geoinformation.

[10]  A. J. Turner,et al.  White light lasers for remote sensing , 2008, Security + Defence.

[11]  Jérôme Genest,et al.  Chemical detection with hyperspectral lidar using dual frequency combs. , 2013, Optics express.

[12]  Ming-Jun Li,et al.  Supercontinuum generation in optical fibers , 2007, SPIE/OSA/IEEE Asia Communications and Photonics.

[13]  Kevin Ke,et al.  Field tests for round-trip imaging at a 1.4  km distance with change detection and ranging using a short-wave infrared super-continuum laser. , 2016, Applied optics.

[14]  Da-Wen Sun,et al.  Application of Hyperspectral Imaging in Food Safety Inspection and Control: A Review , 2012, Critical reviews in food science and nutrition.

[15]  Rami Mannila,et al.  Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared , 2014, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[16]  Teemu Kääriäinen,et al.  Long distance active hyperspectral sensing using high-power near-infrared supercontinuum light source. , 2014, Optics express.

[17]  C. Fabry,et al.  On the Application of Interference Phenomena to the Solution of Various Problems of Spectroscopy and Metrology , 1899 .

[18]  A. Couairon,et al.  Multi-octave supercontinuum generation from mid-infrared filamentation in a bulk crystal , 2012, Nature Communications.

[19]  J. Suomalainen,et al.  Full waveform hyperspectral LiDAR for terrestrial laser scanning. , 2012, Optics express.

[20]  Kevin Ke,et al.  Field trial of active remote sensing using a high-power short-wave infrared supercontinuum laser. , 2013, Applied optics.

[21]  P. Werle,et al.  The limits of signal averaging in atmospheric trace-gas monitoring by tunable diode-laser absorption spectroscopy (TDLAS) , 1993 .

[22]  Heikki Saari,et al.  MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers , 2012 .

[23]  Z. Niu,et al.  Estimation of leaf biochemical content using a novel hyperspectral full-waveform LiDAR system , 2014 .