Bit yield improvement by precise control of stray fields from SAF pinned layers for high-density MRAMs

A write-operating window with a 100% functional bit yield was successfully obtained by the control of stray fields from synthetic antiferromagnetic (SAF) pinned layers in conventional magnetic random access memories with rectangular magnetic tunneling junction bits. The stray fields were controlled by a newly developed ion-beam etching technique without causing damage and by a precise setting of the SAF pinned layer thickness, and are balanced with Neel coupling fields. As a result, it was found that symmetric switching astroid curves with no offset were obtained and switching distributions were minimized at the zero offset field.