Precision fabrication of high-slope convex aspheric optics (Conference Presentation)

High-precision aspheric components are widely used in modern systems with the capability of high image quality, but an high-slope convex aspheric aspheric surface is more challenging to fabricate because of its more complex shape and measuring difficulty compared with other surfaces. As the traditional aspheric surface manufacturing will cause many problems like the tools cannot conform to the local varying curvatures of high slope convex aspheric optics. In this paper, a high efficient approach include CNC generating, MRF fine polishing and multi-wavelength interferometer measurement to get a high-precision convex aspheric surface is presented. A kind of flexible tools was designed to polish the surface and correct MHSF errors on the aspheric surface which can always conform to the surfaceduring the process. And the pressure needed during the polishing process is simulated by COMSOL software. A high-precision convex aspheric surface is successfully obtained and the final surface RMS is better than λ/30.