Closed-loop feedback-control system for improved tracking in magnetically actuated micromirrors
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S. Pannu | Albert P. Pisano | Richard S. Muller | C. Chang | A. Pisano | S. Pannu | C. Chang | R. S. Muller
[1] R. Muller,et al. Magnetically actuated, addressable microstructures , 1997 .
[2] Y. Tai,et al. Micromachined electromagnetic scanning mirrors , 1997 .
[3] Magnetically Actuated Micromirrors for Fiber-Optic Switching , 1998 .
[4] K. Y. Lau,et al. Surface-micromachined microoptical elements and systems , 1998, Proc. IEEE.
[5] M. Wu,et al. Free-space fiber-optic switches based on MEMS vertical torsion mirrors , 1999, Journal of Lightwave Technology.