Techniques for Measuring Rate Constants for Acid Generation from PAG (Photo Acid Generator) during ArF Exposure
暂无分享,去创建一个
Yoshiyuki Kono | Fumihiko Oda | Yukihiro Morimoto | Atsushi Seguchi | Y. Morimoto | F. Oda | Y. Kono | Atsushi Seguchi
[1] Minoru Obara,et al. New high‐efficiency quasi‐continuous operation of a KrF(B→X) excimer lamp excited by microwave discharge , 1989 .
[2] A. Sekiguchi,et al. Study of Deprotection Reaction during Exposure in Chemically Amplified Resists for Lithography Simulation , 2001 .
[3] J. Crivello,et al. Triarylsulfonium salts as photoinitiators of free radical and cationic polymerization , 1979 .
[4] James V. Crivello,et al. Diaryliodonium Salts. A New Class of Photoinitiators for Cationic Polymerization , 1977 .