High performing 8 A EOT HfO/sub 2//TaN low thermal-budget n-channel FETs with solid-phase epitaxially regrown (SPER) junctions
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S. De Gendt | S. Severi | G. Groeseneken | T. Schram | K. De Meyer | D.P. Brunco | M. Heyns | W. Tsai | A. Delabie | L.A. Ragnarsson | Trojmanm L | K.D. Johnson
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