Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition.

A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO(2) and Si substrates by using metal-organic precursors and an NH(3) plasma mixed with a suitable amount of SiH(4) as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm the magnetic anisotropy of Co NRs caused by shape anisotropy.

[1]  Hyungsoo Choi,et al.  Copper Nanowires with a Five‐Twinned Structure Grown by Chemical Vapor Deposition , 2008 .

[2]  G. Molas,et al.  High density platinum nanocrystals for non-volatile memory applications , 2008 .

[3]  C. Trautmann,et al.  Field emission properties of electrochemically deposited gold nanowires , 2008 .

[4]  Sungho Park,et al.  Intraparticle surface plasmon coupling in quasi-one-dimensional nanostructures. , 2008, Nano letters.

[5]  Charles M. Lieber,et al.  Sub-100 nanometer channel length Ge/Si nanowire transistors with potential for 2 THz switching speed. , 2008, Nano letters.

[6]  J. Son,et al.  Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition , 2008, Nanotechnology.

[7]  R. Camley,et al.  Nickel nanowires for planer microwave circuit applications and characterization , 2007 .

[8]  S. Jiang,et al.  Highly Ordered Pd Nanowire Arrays as Effective Electrocatalysts for Ethanol Oxidation in Direct Alcohol Fuel Cells , 2007 .

[9]  M. Lukin,et al.  Generation of single optical plasmons in metallic nanowires coupled to quantum dots , 2007, Nature.

[10]  Po-Tsun Liu,et al.  Nickel nanocrystals with HfO2 blocking oxide for nonvolatile memory application , 2007 .

[11]  M. Knez,et al.  Ferromagnetic nanotubes by atomic layer deposition in anodic alumina membranes , 2007 .

[12]  S. M. Sze,et al.  Memory characteristics of Co nanocrystal memory device with HfO , 2007 .

[13]  Jun Zhang,et al.  Monocrystalline hexagonal-close-packed and polycrystalline face-centered-cubic Co nanowire arrays fabricated by pulse dc electrodeposition , 2007 .

[14]  Yang Zhang,et al.  Multilayered Si/Ni nanosprings and their magnetic properties. , 2007, Small.

[15]  Hyeongnam Kim,et al.  High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition , 2006 .

[16]  Ki-Bum Kim,et al.  Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications , 2006 .

[17]  Ulrich Welp,et al.  Fabrication of Palladium Nanotubes and Their Application in Hydrogen Sensing , 2005 .

[18]  D. Kwong,et al.  Nickel nanocrystal formation on HfO2 dielectric for nonvolatile memory device applications , 2005 .

[19]  Minhee Yun,et al.  Glucose oxidase entrapped in polypyrrole on high-surface-area Pt electrodes: a model platform for sensitive electroenzymatic biosensors , 2005 .

[20]  Weiqi Wang,et al.  Electroless deposition of open-end Cu nanotube arrays , 2004 .

[21]  Minhee Yun,et al.  Electrochemically Grown Wires for Individually Addressable Sensor Arrays , 2004 .

[22]  L. Vila,et al.  Growth and field-emission properties of vertically aligned cobalt nanowire arrays , 2004 .

[23]  Reginald M. Penner,et al.  Sensors from electrodeposited metal nanowires , 2002 .

[24]  F. Favier,et al.  Hydrogen Sensors and Switches from Electrodeposited Palladium Mesowire Arrays , 2001, Science.

[25]  Tom J. Smy,et al.  Periodic magnetic microstructures by glancing angle deposition , 2000 .

[26]  Y. Okawa,et al.  STM study of preferential growth of one-dimensional nickel islands on a Cu(100)-(2)R45°-O surface , 1998 .

[27]  Rodolfo Miranda,et al.  Fabrication of magnetic quantum wires by step‐flow growth of cobalt on copper surfaces , 1995 .

[28]  C. Chien,et al.  Fabrication and Magnetic Properties of Arrays of Metallic Nanowires , 1993, Science.

[29]  Meyer,et al.  Epitaxial growth of thin magnetic cobalt films on Au(111) studied by scanning tunneling microscopy. , 1991, Physical review. B, Condensed matter.

[30]  J. Schuster,et al.  Phase diagrams of the ternary systems Mn, Fe, Co, NiSiN , 1987 .

[31]  Juan Jiang,et al.  Nano-biosensor development for bacterial detection during human kidney infection: Use of glycoconjugate-specific antibody-bound gold NanoWire arrays (GNWA) , 2004, Glycoconjugate Journal.

[32]  I. Schuller,et al.  Ordered magnetic nanostructures: fabrication and properties , 2003 .

[33]  I. Han,et al.  Growth and characterization of silicon-nitride films by plasma-enhanced chemical vapor deposition , 1991 .