Sandwich-type three-dimensional thick-film thermoelectric microgenerators

The paper describes manufacturing process of three-dimensional sandwich type thermoelectric structures made in thick-film/LTCC technology. Such solution allows fabricating much more thermoelements on the same area. This causes a significant increase of output electrical power. PdAg- and Ag-based thick-film inks are used to create arms of thermocouples. Results of their electrical measurements (Seebeck coefficient, resistance) are presented. More than 60 muW of electrical output power were generated when temperature difference was 55 K. After some modifications even higher level of output power is expected.