Investigation of the Crystalline Orientations and Substrates Dependence on Mechanical Properties of PZT Thin Films by Nanoindentation
暂无分享,去创建一个
Barton C. Prorok | Dong-Joo Kim | Dong-Joo Kim | B. Prorok | Dan Liu | Sang H. Yoon | Bo Zhou | Dan Liu | Sang-hoon Yoon | B. Zhou
[1] I. Kanno,et al. PIEZOELECTRIC PROPERTIES OF C-AXIS ORIENTED PB(ZR,TI)O3 THIN FILMS , 1997 .
[2] Yong Sun,et al. Effect of penetration depth on indentation response of soft coatings on hard substrates: a finite element analysis , 2003 .
[3] John S. Wright,et al. Mechanical deformation of PZT thin films for MEMS applications , 1999 .
[4] Bernard Jaffe,et al. CHAPTER 12 – APPLICATIONS OF PIEZOELECTRIC CERAMICS , 1971 .
[5] Xi Chen,et al. Numerical study on the measurement of thin film mechanical properties by means of nanoindentation , 2001 .