论文信息 - Interfacial silicide formation and stress evolution during sputter deposition of ultrathin Pd layers on a-Si. - 字舞流文

Interfacial silicide formation and stress evolution during sputter deposition of ultrathin Pd layers on a-Si.

T. Baumbach | B. Krause | G. Abadias | D. Hauschild | A. Resta | A. Michel | A. Coati | A. Vlad | C. Furgeaud | Y. Garreau