Miniature piezoelectric motors

There is great demand for micro- or miniaturized actuators for practical application. However, magnetic coils of electromagnetic motors are an obstacle to such miniaturization because of their complicated construction. Furthermore, electrostatic micro-motors fabricated by IC-processing cannot generate sufficient output power. Piezoelectric motors are promising because of their simple construction and high power density. In fact, some piezoelectric actuators have been or are close to being launched in the market. For their miniaturization, proper fabrication processes including thick deposition methods are important. In this review, various principles of piezoelectric motors are introduced in addition to suitable fabrication processes.

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