A self-heated silicon nanowire array: selective surface modification with catalytic nanoparticles by nanoscale Joule heating and its gas sensing applications.

We demonstrated novel methods for selective surface modification of silicon nanowire (SiNW) devices with catalytic metal nanoparticles by nanoscale Joule heating and local chemical reaction. The Joule heating of a SiNW generated a localized heat along the SiNW and produced endothermic reactions such as hydrothermal synthesis of nanoparticles or thermal decomposition of polymer thin films. In the first method, palladium (Pd) nanoparticles could be selectively synthesized and directly coated on a SiNW by the reduction of the Pd precursor via Joule heating of the SiNW. In the second method, a sequential process composed of thermal decomposition of a polymer, evaporation of a Pd thin film, and a lift-off process was utilized. The selective decoration of Pd nanoparticles on SiNW was successfully accomplished by using both methods. Finally, we demonstrated the applications of SiNWs decorated with Pd nanoparticles as hydrogen detectors. We also investigated the effect of self-heating of the SiNW sensor on its sensing performance.

[1]  A. Stemmer,et al.  Localized functionalization of surfaces with molecules from solution using electrostatic attraction , 2003 .

[2]  Gengfeng Zheng,et al.  Multiplexed electrical detection of cancer markers with nanowire sensor arrays , 2005, Nature Biotechnology.

[3]  I. Park,et al.  Localized temperature and chemical reaction control in nanoscale space by nanowire array. , 2011, Nano letters.

[4]  Antonella Macagnano,et al.  On-chip fabrication of ultrasensitive NO2 sensors based on silicon nanowires , 2012 .

[5]  P. Norton,et al.  Temperature coefficient of resistance for p- and n-type silicon , 1978 .

[6]  Urs P. Wild,et al.  Fabricating arrays of single protein molecules on glass using microcontact printing , 2003 .

[7]  Nihal Kularatna.  Digital and Analogue Instrumentation: Testing and measurement , 2002 .

[8]  Inkyu Park,et al.  Selective surface functionalization of silicon nanowires via nanoscale joule heating. , 2007, Nano letters.

[9]  Ralph G. Nuzzo,et al.  ADSORPTION OF BIFUNCTIONAL ORGANIC DISULFIDES ON GOLD SURFACES , 1983 .

[10]  C. Lieber,et al.  Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species , 2001, Science.

[11]  Inkyu Park,et al.  Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors , 2012 .

[12]  M. Grimaldi,et al.  Room-temperature grain growth in sputtered nanoscale Pd thin films: Dynamic scaling behaviour on SiO2 , 2009 .

[13]  Ray,et al.  Pressure-composition isotherms for palladium hydride. , 1993, Physical review. B, Condensed matter.

[14]  Xuema Li,et al.  Sequence-Specific Label-Free DNA Sensors Based on Silicon Nanowires , 2004 .

[15]  R. S. Williams,et al.  A new route toward ultrasensitive, flexible chemical sensors: metal nanotubes by wet-chemical synthesis along sacrificial nanowire templates. , 2012, ACS nano.

[16]  Chad A Mirkin,et al.  Direct-write dip-pen nanolithography of proteins on modified silicon oxide surfaces. , 2003, Angewandte Chemie.

[17]  E. Delamarche,et al.  Fabricating microarrays of functional proteins using affinity contact printing. , 2002, Angewandte Chemie.

[18]  C. Grigoropoulos,et al.  Bioelectronic silicon nanowire devices using functional membrane proteins , 2009, Proceedings of the National Academy of Sciences.

[19]  I. Park,et al.  Top-down fabricated silicon nanowire sensors for real-time chemical detection , 2010, Nanotechnology.

[20]  E. Nowicka,et al.  Surface phenomena and isotope effects at low temperature palladium hydride formation and during its decomposition , 1989 .

[21]  J. Fréchet,et al.  Selective surface activation of a functional monolayer for the fabrication of nanometer scale thiol patterns and directed self-assembly of gold nanoparticles. , 2005, Journal of the American Chemical Society.

[22]  Gengfeng Zheng,et al.  Electrical detection of single viruses. , 2004, Proceedings of the National Academy of Sciences of the United States of America.