Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine

We have previously described a practical micromachined power source: the polysilicon, surface-micromachined, electrostatically actuated microengine. Here we report on 3 aspects of implementing the microengine. First, we discuss demonstrations of the first-generation microengine actuating geared micromechanisms including gear trains with elements having dimensions comparable to the drive gear (about 50 {mu}m) and a relatively large (1600-{mu}m-diameter) rotating optical shutter element. These configurations span expected operating extremes for the microengine and address the coupling and loading issues for very-low-aspect-ratio micromechanisms which are common to the design of surface-micromachined devices. Second, we report on a second-generation of designs that utilize improved gear teeth design, a gear speed-reduction unit, and higher force-per-unit-area electrostatic comb drives. The speed-reduction unit produces an overall angular speed reduction of 9.63 and requires dual-level compound gears. Third, we discuss a dynamics model developed to accomplish 3 objectives: drive inertial loads in a controlled fashion, minimize stress and frictional forces during operation, and determine as a function of time the forces associated with the drive gear (eg load torque on drive gear from friction).