Micromechanical devices at JPL for space exploration
暂无分享,去创建一个
[1] T. Sato,et al. Fine surface finishing method for 3-dimensional micro structures , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.
[2] William J. Kaiser,et al. Development of Microseismometers for Space Applications , 1996 .
[3] Wen Li,et al. Design, Analysis and Fabrication of a Vaporizing Liquid Micro-Thruster , 1997 .
[4] A. Heuberger,et al. Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I . Orientation Dependence and Behavior of Passivation Layers , 1990 .
[5] K. Ikuta,et al. Real three dimensional micro fabrication using stereo lithography and metal molding , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.
[6] R. Howe. Surface micromachining for microsensors and microactuators , 1988 .
[7] SURFACE ACOUSTIC WAVE MICROHYGROMETER , 1997 .
[8] D. Bäuerle. Laser-chemical processing: recent developments , 1996 .
[9] A LIGA Fabricated Quadrupole Array for Mass Spectroscopy , 1997 .
[10] V. Vorperian,et al. A packaged silicon MEMS vibratory gyroscope for microspacecraft , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
[11] U. Wallrabe,et al. Microactuators fabricated by the LIGA process , 1992 .
[12] Juergen Mueller,et al. Thruster Optins for Microspacecraft: A Review and Evaluation of Existing Hardware and Emerging Technologies , 1997 .
[13] A. Heuberger,et al. Anisotropic Etching of Crystalline Silicon in Alkaline Solutions II . Influence of Dopants , 1990 .