Structural optimization of a large-displacement electromagnetic Lorentz force microactuator for optical switching applications

This paper discusses optimization of an electromagnetic microactuator for large-displacement optical switching. The microactuator used in this research is a laterally driven electromagnetic one that provides parallel actuation to the silicon substrate surface (in-plane motion) using the Lorentz force. When the microactuator is driven by the distributed Lorentz force induced along the arch-shaped leaf springs, a buckling phenomenon in two leaf springs enables a large displacement with a relatively small actuation load. An important design objective of a microactuator is to achieve a large displacement with a low actuating force. In this research, two optimization formulations have been performed to improve the displacement capabilities of the microactuator. In the first, the actuation load to obtain a specific displacement is minimized, subject to constraints on the first natural frequency and maximum allowable stress. In the second, the actuation displacement for a given actuation load is maximized, subject to the same constraints as in the first formulation. These optimizations have generated considerably improved designs, making the actuators capable of large-displacement actuations with small actuating loads.