Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films

We present laser-induced forward transfer of solid-phase polymer films, shaped using a Digital Micromirror Device (DMD) as a variable illumination mask. Femtosecond laser pulses with a fluence of 200-380 mJ/cm2 at a wavelength of 800 nm from a Ti:sapphire amplifier were used to reproducibly transfer thin films of poly(methyl methacrylate) as small as ~30 µm by ~30 µm with thickness ~1.3 µm. This first demonstration of DMD-based solid-phase LIFT shows minimum feature sizes of ~10µm.

[1]  C. Liu,et al.  Recent Developments in Polymer MEMS , 2007 .

[2]  P. Delaporte,et al.  Smart beam shaping for the deposition of solid polymeric material by laser forward transfer , 2014 .

[3]  Martin E. Garcia,et al.  Silicon before the bonds break , 2014 .

[4]  R. Eason,et al.  Triazene photopolymer dynamic release layer-assisted femtosecond laser-induced forward transfer with an active carrier substrate , 2008 .

[5]  Ruixin Dong,et al.  Memristive behavior of ZnO film with embedded Ti nano-layers , 2014 .

[6]  H. Kim,et al.  Laser forward transfer based on a spatial light modulator , 2011 .

[7]  Andrew Y. Wang,et al.  Laser-assisted forward transfer of multi-spectral nanocrystal quantum dot emitters , 2007 .

[8]  Douglas B. Chrisey,et al.  Absorbing film assisted laser induced forward transfer of fungi (Trichoderma conidia) , 2004 .

[9]  A. Majumdar,et al.  Stamp-and-stick room-temperature bonding technique for microdevices , 2005, Journal of Microelectromechanical Systems.

[10]  Scott A. Mathews,et al.  High-speed video study of laser-induced forward transfer of silver nano-suspensions , 2013 .

[11]  Din Ping Tsai,et al.  Fabrication of multilayer metamaterials by femtosecond laser‐induced forward‐transfer technique , 2012 .

[12]  D. Di Carlo,et al.  Rapid prototyping polymers for microfluidic devices and high pressure injections. , 2011, Lab on a chip.

[13]  Roland Hany,et al.  Aryltriazene Photopolymers for UV-Laser Applications: Improved Synthesis and Photodecomposition Study , 2007 .

[14]  Alberto Piqué,et al.  Laser Forward Transfer of Functional Materials for Digital Fabrication of Microelectronics , 2013 .

[15]  Boris N. Chichkov,et al.  Laser fabrication of large-scale nanoparticle arrays for sensing applications. , 2011, ACS nano.

[16]  Anne-Patricia Alloncle,et al.  Time-resolved shadowgraph imaging of femtosecond laser-induced forward transfer of solid materials , 2012 .

[17]  Frank Nüesch,et al.  Red-green-blue polymer light-emitting diode pixels printed by optimized laser-induced forward transfer , 2012 .

[18]  R. Eason,et al.  Polymer-coated compliant receivers for intact laser-induced forward transfer of thin films: experimental results and modelling , 2014 .

[19]  Michael C. McAlpine,et al.  Piezoelectric ribbons printed onto rubber for flexible energy conversion. , 2010, Nano letters.

[20]  R. Eason,et al.  Fabrication of a thermoelectric generator on a polymer-coated substrate via laser-induced forward transfer of chalcogenide thin films , 2013 .

[21]  Philippe Delaporte,et al.  Comparative time resolved shadowgraphic imaging studies of nanosecond and picosecond laser transfer of organic materials , 2009, International Symposium on High Power Laser Systems and Applications.

[22]  Alberto Piqué,et al.  Laser forward transfer using structured light. , 2015, Optics express.

[23]  Frank Nüesch,et al.  Laser-Induced Forward Transfer of Organic LED Building Blocks Studied by Time-Resolved Shadowgraphy† , 2010 .

[24]  F. J. Adrian,et al.  Metal deposition from a supported metal film using an excimer laser , 1986 .

[25]  Yonggang Huang,et al.  Ultrathin Silicon Circuits With Strain‐Isolation Layers and Mesh Layouts for High‐Performance Electronics on Fabric, Vinyl, Leather, and Paper , 2009 .

[26]  R. Eason,et al.  Micron-scale copper wires printed using femtosecond laser-induced forward transfer with automated donor replenishment , 2013 .

[27]  Dana D. Dlott,et al.  High-speed color imaging by laser ablation transfer with a dynamic release layer: fundamental mechanisms , 1993 .