Fabrication and characterizations of a monolithic PZT microstage

This paper reports on the fabrication and characterizations of a monolithic Pb(ZrTi)O3 (PZT) microstage with multi-degrees of freedom for high-precision positioning. The entire device is fabricated in a symmetrical arrangement from a PZT plate with a size of 15 × 15 × 0.8 mm3. Four actuation units with displacement amplification mechanisms are integrated in the structure. All the actuators can be driven individually which result in movements of a stage in different directions. The main fabrication steps include dicing, electroplating, lithography and laser machining. The performances of the displacement and the resonant frequencies of the microstage are simulated using a finite element method (FEM) with different dimensions. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.

[1]  Kwang-Cheol Lee,et al.  Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication , 2004 .

[2]  Yong-Kweon Kim,et al.  Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage , 2003 .

[3]  Li Fan,et al.  Self-assembled microactuated XYZ stages for optical scanning and alignment , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[4]  T. Ono,et al.  Fabrication of high accuracy micro-translation-table for near-field optical data storage actuated by inverted-scratch-drive-actuators , 2002, 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers..

[5]  W. Häberle,et al.  Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications , 2000 .

[6]  Bergander,et al.  Micropositioners for microscopy applications and microbiology based on piezoelectric actuators , 2002 .

[7]  Masayoshi Esashi,et al.  Microprobe array with electrical interconnection for thermal imaging and data storage , 2002 .

[8]  Hyoung J. Cho,et al.  Magnetically-driven bi-directional optical microscanner , 2003 .

[9]  A. Pisano,et al.  Modeling and optimal design of piezoelectric cantilever microactuators , 1997 .

[10]  Jiaping Yang,et al.  An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives , 2005 .

[11]  Masayoshi Esashi,et al.  Electrical modification of a conductive polymer using a scanning probe microscope , 2003 .

[12]  P. Gao,et al.  A new piezodriven precision micropositioning stage utilizing flexure hinges , 1999 .

[13]  Martin L. Culpepper,et al.  Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism , 2004 .

[14]  Sungho Lee,et al.  Precise position control of a linear stage integrated with an inchworm type actuator , 2004, SICE 2004 Annual Conference.

[15]  M.V. Shutov,et al.  Electrostatic actuators with long range translation , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[16]  M. Esashi,et al.  Piezoactuator-integrated monolithic microstage with six degrees of freedom , 2005, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[17]  V. P. Jaecklin,et al.  Micromechanical Comb Actuators with Low Driving Voltage , 1992 .