New materials of co-doped ZnO for LEDs and thin films solar cells

Solar Cells Yuan Yu-zhen,Wang Hui 1.School of Science,Shandong University of Technology,Zibo 255049,China ; 2.School of Materials Science and Engineering,Shan Dong University of Technology,Zibo 255049,China 1.Yuanyuzhen@sdut.edu.cn 2.brilliance_wang@yahoo.cn Abstract: Zr-Al co-doped ZnO (AZZO) were prepared by DC magnetron sputtering on glass slide substrates under different sputtering powers.Microstructure,Electrical and optical properties of AZZO thin films were investigated.The AZZO films with an electrical resistivity as low as 1.07×10Ωcm and an average optical transmission of 88.5% in the visible range were obtained at DC power of 170 W.The optical bandgap depends on the deposition condition,and was in the range of 3.48-3.57 eV.These results make the possibility for light emitting diodes(LEDs) and solar cells with AZZO films as transparent electrodes. OCIS codes: 310.1860: Deposition and fabrication,310.6870: Thin films,other properties