论文信息 - High Resolution Micro-Displacement Sensing Circuit for Rotor Micro-Gyroscope

High Resolution Micro-Displacement Sensing Circuit for Rotor Micro-Gyroscope

A novel CMOS interface circuit with high resolution is designed and realized to achieve the integration of interface circuit for liquid suspended rotor micro-gyroscope. The detecting circuit adopts continuous-time current sensing circuit for capacitance measurement. The equivalent output noise power spectral density of phase-sensitive demodulation is 120 nV/Hz1/2. The whole circuitry is realized with 0.5 μm 2P2M CMOS process and its testing results show the circuit has a relative capacitance resolution of 1×10-8, in which the power supply is 18 V and the power consumption is 30 mW. The area of the chip is merely 18.5 mm2.

Xiao Wei Liu | Ming Yuan Ren | Zhi Gang Mao | Haifeng Zhang

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