论文信息 - Micromolding of NiFe and Ni Thick Films for 3D Integration of MEMS - 字舞流文

Micromolding of NiFe and Ni Thick Films for 3D Integration of MEMS

Olivier Garel | Thi Hong Nhung Dinh | Johan Moulin | Johan Moulin | Elie Lefeuvre | Tao Peng | Marion Woytasik | Meritxell Cortés | Magdalèna Couty | Yanan Zhu | Malika Souadda | É. Lefeuvre | Yanan Zhu | M. Woytasik | Meritxell Cortés | J. Moulin | M. Couty | Meritxell Cortés | Thi Hong Nhung Dinh | Tao Peng | O. Garel | Malika Souadda

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