About the intrinsic resistance variability in HfO2-based RRAM devices

Resistive memories (RRAM) are attracting a wide interest as candidates for the next generation memory technology, in particular for embedded and, more generally, for low power applications like IoT. However, their variability still remains a concern as the latter has been proven to be an intrinsic feature linked to the filamentary switching mechanism. In this paper we will review some recent key results by our and other groups that show the fundamental variability limits of the HfO2-based technology and some possible alternatives.

[1]  T. Ma,et al.  Work function of In2O3 film as determined from internal photoemission , 1980 .

[2]  E. Seevinck,et al.  Static-noise margin analysis of MOS SRAM cells , 1987 .

[3]  J. De Blauwe,et al.  Nanocrystal nonvolatile memory devices , 2002 .

[4]  A. Sawa Resistive switching in transition metal oxides , 2008 .

[5]  Frederick T. Chen,et al.  Improvement of resistive switching characteristics in TiO2 thin films with embedded Pt nanocrystals , 2009 .

[6]  Shih-Cheng Chen,et al.  Developments in nanocrystal memory , 2011 .

[7]  Simon M. Sze,et al.  Influence of nanocrystals on resistive switching characteristic in binary metal oxides memory devices , 2011 .

[8]  G. Ghibaudo,et al.  Scalability of split-gate charge trap memories down to 20nm for low-power embedded memories , 2011, 2011 International Electron Devices Meeting.

[9]  V. Kannan,et al.  Controllable switching ratio in quantum dot/metal–metal oxide nanostructure based non-volatile memory device , 2012 .

[10]  Shimeng Yu,et al.  Metal–Oxide RRAM , 2012, Proceedings of the IEEE.

[11]  C. Cagli,et al.  Quantum point contact model of filamentary conduction in resistive switching memories , 2012, 2012 13th International Conference on Ultimate Integration on Silicon (ULIS).

[12]  Jane A. Yater Implementation of Si nanocrystals in non-volatile memory devices , 2013 .

[13]  Xuedong Bai,et al.  Recent development of studies on the mechanism of resistive memories in several metal oxides , 2013 .

[14]  Albert Chin,et al.  Nano-crystallized titanium oxide resistive memory with uniform switching and long endurance , 2013 .

[15]  Michael Graef,et al.  A 2D closed form model for the electrostatics in hetero-junction double-gate tunnel-FETs for calculation of band-to-band tunneling current , 2014, Microelectron. J..

[16]  B. Giraud,et al.  Resistive Memories for Ultra-Low-Power embedded computing design , 2014, 2014 IEEE International Electron Devices Meeting.

[17]  Ching-Te Chuang,et al.  Evaluation of Stability, Performance of Ultra-Low Voltage MOSFET, TFET, and Mixed TFET-MOSFET SRAM Cell With Write-Assist Circuits , 2014, IEEE Journal on Emerging and Selected Topics in Circuits and Systems.

[18]  A. Seabaugh,et al.  Tunnel Field-Effect Transistors: State-of-the-Art , 2014, IEEE Journal of the Electron Devices Society.

[19]  Gerard Ghibaudo,et al.  Modeling of OxRAM variability from low to high resistance state using a stochastic trap assisted tunneling-based resistor network , 2015, EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon.

[20]  G. Ghibaudo,et al.  Investigation of the potentialities of Vertical Resistive RAM (VRRAM) for neuromorphic applications , 2015, 2015 IEEE International Electron Devices Meeting (IEDM).

[21]  Luca Selmi,et al.  Impact of TFET Unidirectionality and Ambipolarity on the Performance of 6T SRAM Cells , 2015, IEEE Journal of the Electron Devices Society.

[22]  T. Yamamoto,et al.  Low-power embedded ReRAM technology for IoT applications , 2015, 2015 Symposium on VLSI Technology (VLSI Technology).

[23]  G. Cibrario,et al.  Fundamental variability limits of filament-based RRAM , 2016, 2016 IEEE International Electron Devices Meeting (IEDM).

[24]  D. Ielmini,et al.  SiOx-based resistive switching memory (RRAM) for crossbar storage/select elements with high on/off ratio , 2016, 2016 IEEE International Electron Devices Meeting (IEDM).

[25]  Sebastiano Strangio,et al.  Experimental demonstration of strained Si nanowire GAA n-TFETs and inverter operation with complementary TFET logic at low supply voltages , 2016 .

[26]  Luca Larcher,et al.  A multi‐scale methodology connecting device physics to compact models and circuit applications for OxRAM technology , 2016 .

[27]  Peng Zhou,et al.  Resistive Switching and Synaptic Behaviors of TaN/Al2O3/ZnO/ITO Flexible Devices With Embedded Ag Nanoparticles , 2016, IEEE Electron Device Letters.

[28]  E. Vianello,et al.  Universal Signatures from Non-Universal Memories: Clues for the Future... , 2016, 2016 IEEE 8th International Memory Workshop (IMW).

[29]  Michael Graef,et al.  Implementation of a DC compact model for double-gate Tunnel-FET based on 2D calculations and application in circuit simulation , 2016, 2016 46th European Solid-State Device Research Conference (ESSDERC).