Demonstration of 40-nm Channel Length Top-Gate p-MOSFET of WS2 Channel Directly Grown on SiO $_{{x}}$ /Si Substrates Using Area-Selective CVD Technology
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Kai-Shin Li | T. Lai | J. Shieh | Tzu-Chiang Chen | C. Chien | Chao-Ching Cheng | Lain‐Jong Li | Ming-Yang Li | H. Chiang | H. P. Wong | S. Su | W. Jian | Jyun-Hong Chen | Chi-Feng Li | Yun-Yan Chung | Chao-Ting Lin | Kuan-Cheng Lu