论文信息 - Fabrication, characterization, and reliability study of AlN-driven cantilevers

Fabrication, characterization, and reliability study of AlN-driven cantilevers

The goal of this study was the investigation of reliability of AlN driven cantilevers, operating as MEMS actuators. Some of the fabrication steps being critical in regards to reliability issues, these steps have been firstly optimized. Then the monitoring of fatigue effects produced by thermal loading (130° C) of cantilevers, introducing the evolution of micromechanical parameters has been obtained by Twyman-Green interferometry. The measurements of evolution of resonance frequencies and displacement amplitudes permit the estimation of the long-term stability of such AlN based actuators.

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