Fundamentals and technology for monolithically integrated RF MEMS switches with ultra-nanocrystalline diamond dielectric/CMOS devices
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S. O'Brien | J. A. Carlisle | C. Goldsmith | A. V. Sumant | D. C. Mancini | O. Auciello | S. Sampath | C. Gudeman | W. Wang | J. C. M. Hwang | J. Swonger | S. Balachandran | C. Goldsmith | O. Auciello | J. Carlisle | A. Sumant | D. Mancini | S. Sampath | J. Hwang | C. Gudeman | S. Balachandran | J. Swonger | S. O'Brien | W. Wang
[1] J. Butler,et al. Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications , 2010 .
[2] Lloyd M. Smith,et al. DNA-modified nanocrystalline diamond thin-films as stable, biologically active substrates , 2002, Nature materials.
[3] J.C.M. Hwang,et al. Top vs. bottom charging of the dielectric in RF MEMS capacitive switches , 2006, 2006 Asia-Pacific Microwave Conference.
[4] J. C. Madaleno,et al. Nitrogen and hydrogen related infrared absorption in CVD diamond films , 2006 .
[5] Jacqueline A. Johnson,et al. Interpretation of the Raman spectra of ultrananocrystalline diamond , 2005 .
[6] Orlando Auciello,et al. Electron field emission for ultrananocrystalline diamond films , 2001 .
[7] Zheng Peng,et al. Understanding and improving longevity in RF MEMS capacitive switches , 2008, SPIE MOEMS-MEMS.
[8] John A. Carlisle,et al. Low temperature growth of ultrananocrystalline diamond , 2004 .
[9] O. Auciello,et al. Large-area low-temperature ultrananocrystalline diamond (UNCD) films and integration with CMOS devices for monolithically integrated diamond MEMS/NEMS-CMOS systems , 2009, Defense + Commercial Sensing.
[10] Xingcheng Xiao,et al. Dielectric properties of hydrogen-incorporated chemical vapor deposited diamond thin films , 2007 .
[11] Horacio Dante Espinosa,et al. Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films , 2004 .
[12] James Weiland,et al. In vitro and in vivo evaluation of ultrananocrystalline diamond for coating of implantable retinal microchips. , 2006, Journal of biomedical materials research. Part B, Applied biomaterials.
[13] O. Auciello,et al. Surface chemistry and bonding configuration of ultrananocrystalline diamond surfaces and their effects on nanotribological properties , 2007 .
[14] J.C.M. Hwang,et al. Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches , 2010, 2010 IEEE MTT-S International Microwave Symposium.
[15] O. Auciello,et al. Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond , 2005 .