Extreme UV measurements of a varied line-space Hitachi reflection grating: efficiency and scattering.

The first extreme UV measurements of a grating mechanically ruled with smooth variations in the grating constant are presented. The grating characteristics are summarized and a schematic of the testing apparatus is shown and described. The procedure for obtaining the absolute grating efficiency is given. The results for that efficiency as a function of wavelengths of 68, 170, 256, 304, 584, and 1216 A are reported and discussed. Efficiency measurements were also made as a function of position across the ruled width at 256 A and 87 deg incident angle, and the results are discussed. Scattering measurements performed via computer acquisition of diffracted image profiles are reported.