Self-aligned assembly of microlens arrays with micromirrors
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Lenslet integrated Micro-Electro-Mechanical Deformable Micromirrors (LMEM-DMs) are electrostatic micromirror arrays fabricated through a commercial surface micromachining process and integrated with polymer or glass microlenses. The electronics resins (Photo-BCB) which are photo-sensitive polymers were used to fabricate polymer microlens arrays. A 4 X 4 element photo-BCB Cyclotene microlens array was fabricated on a thin quartz substrate. Self-aligned soldering flip-chip assembly is applied to integrate microlens arrays directly over the micromirrors. The lens/mirror gap is controlled using the final height of solder balls, and the lateral alignment is achieved by the solder self-aligning mechanism. The LMEM-DM is attractive due to its low cost and the low drive voltages. The use of a lenslet to focus the incoming laser beam onto the reflective surface of a micromirror substantially increases overall optical fill factor of the micromirror array. The LMEM-DM provides superior aberration correction with low residual diffraction effects. For mirror deflections much smaller than the lenslet focal length, the LMEM-DM behaves as a phase-only modulating optical element. The LMEM-DM thus serves as a rugged, compact optical element for beam steering, beam shaping, and aberration correction applications.
[1] Yung-Cheng Lee,et al. Modeling for solder self-assembled MEMS , 1998, Photonics West.
[2] Adisorn Tuantranont,et al. Flip-chip integration of lenslet arrays on segmented deformable micromirrors , 1999, Design, Test, Integration, and Packaging of MEMS/MOEMS.
[3] Yung-Cheng Lee,et al. Design of solder joints for self-aligned optoelectronic assemblies , 1995 .