Micro-machining and micro-grinding with tools fabricated by micro electro-discharge machining

This paper provides an overview of several approaches to micro-machining by mechanical and electro-discharge means of material removal. Two steps are required in machining micro features. Firstly, a custom-shaped tool is created from suitable stock. In many cases, this is carried out using a small-scale version of wire Electro-Discharge Machining (EDM) in tool materials such as sintered PolyCrystalline Diamond (PCD) or tungsten carbide. Then the micro-tool can be used as a miniature end mill, drill or abrasive wheel. Each of these mechanical machining methods can be combined with EDM to achieve a customisable surface finish and feature accuracy. Trade-offs such as tool wear, Material Removal Rate (MRR) and machining time are discussed in this paper within the context of several examples.

[1]  Duc Truong Pham,et al.  Micro-EDM—recent developments and research issues , 2004 .

[2]  Mahmudur Rahman,et al.  A study on the machining of high-aspect ratio micro-structures using micro-EDM , 2003 .

[3]  Kamlakar P Rajurkar,et al.  Material Removal in WEDM of PCD Blanks , 1993 .

[4]  J. Schmidt,et al.  New applications for micro-EDM , 2004 .

[5]  Kai Egashira,et al.  Micro-drilling of monocrystalline silicon using a cutting tool , 2002 .

[6]  Takahisa Masuzawa,et al.  Wire Electro-Discharge Grinding for Micro-Machining , 1985 .

[7]  T. Masuzawa,et al.  An index to evaluate the wear resistance of the electrode in micro-EDM , 2004 .

[8]  D. M. Allen,et al.  Micro electro-discharge machining of ink jet nozzles: optimum selection of material and machining parameters , 1996 .

[9]  Y Ansel,et al.  Development of tools for handling and assembling microcomponents , 2002 .

[10]  D. Adams,et al.  Microgrooving and microthreading tools for fabricating curvilinear features , 2000 .

[11]  Chia-Lung Kuo,et al.  Fabrication of series-pattern micro-disk electrode and its application in machining micro-slit of less than 10 μm , 2004 .

[12]  Hans Kurt Tönshoff,et al.  Three-Dimensional Micromachining by Machine Tools , 1997 .

[13]  Zuyuan Yu,et al.  3D micro-EDM with simple shape electrode Part1: Machining of cavities with sharp corners and electrode wear compensation , 2000, Proceedings KORUS 2000. The 4th Korea-Russia International Symposium On Science and Technology.

[14]  H. Brussel,et al.  Micro-electro-discharge machining as microsensor fabrication technology , 2003 .

[15]  Chris Morgan,et al.  PRECISION OF MICRO SHAFTS MACHINED WITH WIRE ELECTRO-DISCHARGE GRINDING , 2003 .

[16]  Y. H. Liu,et al.  Electric discharge milling of polycrystalline diamond , 1997 .

[17]  Shan Xue Chuan,et al.  The effects of electro-discharge machining block electrode method for microelectrode machining , 2002 .

[18]  Christopher James Morgan.  MICRO ELECTRO-DISCHARGE MACHINING: TECHNIQUES AND PROCEDURES FOR MICRO FABRICATION , 2004 .

[19]  R. Scattergood,et al.  Ductile-Regime Grinding: A New Technology for Machining Brittle Materials , 1991 .

[20]  T. Masuzawa,et al.  Micro-EDM for Three-Dimensional Cavities - Development of Uniform Wear Method - , 1998 .

[21]  Biing-Hwa Yan,et al.  Micro-hole machining of carbide by electric discharge machining , 1999 .

[22]  Eric R. Marsh,et al.  Micro machining glass with polycrystalline diamond tools shaped by micro electro discharge machining , 2004 .

[23]  Bryan Kok Ann Ngoi,et al.  Ductile Regime Finish Machining - A Review , 2000 .

[24]  Han Huang,et al.  Fabrication of symmetrical section microfeatures using the electro-discharge machining block electrode method , 2002 .

[25]  Takahisa Masuzawa,et al.  A Combined Electrical Machining Process for Micronozzle Fabrication , 1994 .