Online Rescheduling in Semiconductor Manufacturing

Semiconductor manufacturing is mainly characterized by diversity of products, different process types, and random failures. It is extremely difficult to solve scheduling problems due to high frequency of disturbance occurrence. This paper proposes a new approach for the online manufacturing rescheduling method. Instead of having a dispatching process based on dispatching rules once again, we revise the existing schedule based on message passing principle once the disturbance occurs, and improve the performance of the revised schedule by the introduction of a quick local search according to permutations of processes on semi-critical paths. The proposed method can release the influence of disturbances in less than 1 second, and finish rescheduling process in less than 1 minute. Through the actual problems with about 200,000 processes, this method is evaluated to be more effective for actual manufacturing than the dispatching-rule based methods, some of which have been applied in many facilities.

[1]  H. Toba.  Segment-based approach for real-time reactive rescheduling for automatic manufacturing control , 2000 .

[2]  John W. Fowler,et al.  A new scheduling approach using combined dispatching criteria in wafer fabs , 2003 .

[3]  Yeong-Dae Kim,et al.  Simulation-based real-time scheduling in a flexible manufacturing system , 1993 .

[4]  M. D. Johnston.  Reconciling high-speed scheduling with dispatching in wafer fabs , 2001, 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).

[5]  Chun-Hung Chen,et al.  Efficient composition of good enough dispatching policies for semiconductor manufacturing , 2003 .

[6]  Reha Uzsoy,et al.  Decomposition algorithms for scheduling semiconductor testing facilities , 1995, Seventeenth IEEE/CPMT International Electronics Manufacturing Technology Symposium. 'Manufacturing Technologies - Present and Future'.

[7]  E. Nowicki,et al.  A Fast Taboo Search Algorithm for the Job Shop Problem , 1996 .

[8]  R. Hino,et al.  Message exchange method for decentralized scheduling , 2001, Proceedings of the 2001 IEEE International Symposium on Assembly and Task Planning (ISATP2001). Assembly and Disassembly in the Twenty-first Century. (Cat. No.01TH8560).

[9]  Manfred Mittler,et al.  Comparison of dispatching rules for semiconductor manufacturing using large facility models , 1999, WSC '99.

[10]  Appa Iyer Sivakumar,et al.  Job shop scheduling techniques in semiconductor manufacturing , 2006 .