论文信息 - Deflection of a substrate induced by an anisotropic thin‐film stress

Deflection of a substrate induced by an anisotropic thin‐film stress

The deflection of a substrate caused by an anisotropic stress in a thin film that is deposited on it, is studied theoretically. An exact solution of the elastic equations for the three‐dimensional cantilever problem is found. Equations for the deflection caused by anisotropic stresses due to, e.g., magnetostriction and by isotropic stresses are given. A comparison is made between these equations and the equations usually given in the literature for the determination of thin‐film stresses.

E. van de Riet

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