论文信息 - Efficiency improvement of a chip-size antenna for wireless microsystems

Efficiency improvement of a chip-size antenna for wireless microsystems

This work reports on the use of bulk-micromachining technology to increase the efficiency of a folded shorted-patch antenna. This antenna was designed on two stacked wafers (glass bonded on high-resistivity silicon). The analysis was carried out using the HFSS FEM tool. It was shown that bulk-micromachining technology could be used together with HRS to increase the antenna efficiency by ~20 %. Also, it can be used to allow the use of low-resistivity silicon for antenna substrate. Furthermore, bulk-micromachining technology can be used as an option to tune or to select the antenna operating frequency.

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