Performance of hydrothermal PZT film on high intensity operation

Hydrothermally deposited PZT film transducers were examined for large vibration amplitude level at resonance frequency. It was demonstrated that the hydrothermal PZT film has superior performance in terms of linearity and maximum vibration velocity. The linearity of frequency response around resonance was excellent and superior than bulk material up to high intensity operation. The maximum vibration velocity of a flexural transducer was 1.3 m/sec. Concerning a longitudinal transducer, two deposition processes were tried. The maximum vibration velocities were 0.53 m/sec and 0.9 m/sec. These values were almost two times larger than bulk PZT materials for high power applications.

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