Improvement of Positioning Performance of AZARASHI (Seal) Mechanism with Three Degrees of Freedom
暂无分享,去创建一个
[1] Zhongwei Jiang,et al. Nonlinear Hysteresis Compensation of Piezoelectric Ceramic Actuators , 1996 .
[2] Ohmi Fuchiwaki,et al. Micromanipulation by Miniature Robots in a SEM Vacuum Chamber , 2002, J. Robotics Mechatronics.
[3] Katsushi Furutani,et al. Coarse and fine positioning performance of an L-shaped seal mechanism with three degrees of freedom , 2004 .
[4] Satoshi Konishi,et al. Electrostatic Controlled Linear Inchworm Actuator , 2002 .
[5] Toshiro Higuchi,et al. A dual tunneling‐unit scanning tunneling microscope , 1990 .
[6] T. Higuchi,et al. Precise Positioner Utilizing Rapid Deformations of a Piezoelectric Element , 1988 .
[7] G. Mariotto,et al. DYNAMIC BEHAVIOR OF A PIEZOWALKER, INERTIAL AND FRICTIONAL CONFIGURATIONS , 1999 .
[8] Chunli Bai,et al. PIEZOELECTRIC PUSH-PULL MICROPOSITIONER FOR BALLISTIC ELECTRON EMISSION MICROSCOPE , 1997 .
[9] Toru Tojo,et al. Piezoelectrically driven XYθ table for submicron lithography systems , 1989 .
[10] Naotake Mohri,et al. Effect of lubrication on impact drive mechanism , 1998 .