Design of Micro-meter Position Driver for X-Y Stage Using Linear Ultrasonic Motor

The ultrasonic piezo motor is a new type motor that has an excellent performance and many useful features that electromagnetic motors do not have. But, it suffers from severe system non-linearities and parameter variations especially during speed control. Therefore, it is difficult to accomplish satisfactory control performance by using the conventional PID controller. In this paper, to achieve the precise control for linear type ultrasonic motor was analyzed as a function of response time and change with a driving time. Also, we propose controller that combines STEP controller and PD controller that have error of about liner type ultrasonic motor.