Stable microcrystalline silicon thin-film transistors produced by the layer-by-layer technique
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Regis Vanderhaghen | Romain Brenot | Bernard Drevillon | I. D. French | Pavel Bulkin | P. Roca i Cabarrocas | R. Brenot | B. Drévillon | P. Cabarrocas | I. French | R. Vanderhaghen | P. Bulkin
[1] S. Hamma,et al. Metastability studies in silicon thin films: from short range ordered to medium and long range ordered materials , 1998 .
[3] J. P. M. Schmitt,et al. A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition , 1991 .
[4] Jackson Ho,et al. LASER PROCESSING OF POLYSILICON THIN-FILM TRANSISTORS : GRAIN GROWTH AND DEVICE FABRICATION , 1998 .
[5] S. Hamma,et al. Long range effects of hydrogen during microcrystalline silicon growth , 1997 .
[6] J. R. Hughes,et al. Time and temperature dependence of instability mechanisms in amorphous silicon thin-film transistors , 1989 .
[7] B. Drévillon,et al. Plasma enhanced chemical vapour deposition of silica thin films in an integrated distributed electron cyclotron resonance reactor , 1997 .
[8] S. Hamma,et al. In situ correlation between the optical and electrical properties of thin intrinsic and n-type microcrystalline silicon films , 1997 .
[9] J. R. Ayres,et al. Characterisation of low temperature poly-Si thin film transistors , 1991 .
[10] S. Hamma,et al. Microcrystalline Silicon Growth: Deposition Rate Limiting Factors , 1998 .
[11] R. Hornsey,et al. Stability of Amorphous Silicon Thin Film Transistors for Analog Circuit Applications , 1997 .
[12] Arvind Shah,et al. Complete microcrystalline p-i-n solar cell—Crystalline or amorphous cell behavior? , 1994 .
[13] R. Brenot,et al. Real-time measurement of the evolution of carrier mobility in thin-film semiconductors during growth , 1999 .
[14] K. Fujimoto,et al. Low Temperature Fabrication of Poly-Si TFTs using in-situ Chemically Cleaning Method , 1992 .
[15] S. D. Brotherton. Polycrystalline silicon thin film transistors , 1995 .
[16] T. Sameshima. Status of Si thin film transistors , 1998 .
[17] R. Schropp,et al. Stable amorphous-silicon thin-film transistors , 1997 .
[18] Robert A. Street,et al. Large Area Electronics, Applications and Requirements , 1998 .
[19] Tri-Rung Yew,et al. Thin Film Transistors Made from Hydrogenated Microcrystalline Silicon , 1994 .
[20] J. Kanicki,et al. Bias Stress Induced Instabilities in Amorphous Silicon Nitride / Crystalline Silicon and Amorphous Silicon Nitride / Amorphous Silicon Structures , 1991 .
[21] J. Andreu,et al. New features of the layer‐by‐layer deposition of microcrystalline silicon films revealed by spectroscopic ellipsometry and high resolution transmission electron microscopy , 1996 .