Tuning Optical Properties of Al2O3/ZnO Nanolaminates Synthesized by Atomic Layer Deposition

Nanolaminates are of great interest for their unique properties such as high dielectric constants and advanced mechanical, electrical, and optical properties. Here we report on the tuning of optical and structural properties of Al2O3/ZnO nanolaminates designed by atomic layer deposition (ALD). Structural properties of nanolaminates were studied by SEM, GIXRD, and AFM. Optical characterization was performed by transmittance and photoluminescence (PL) spectroscopy. Complex study of monolayer properties was performed by ellipsometry. Optical constants for Al2O3 and ZnO monolayer were calculated. The band gap of ZnO single layers and the excitonic PL peak position were shifted to the UV region related to quantum confinement effects. No peaks in the UV region were observed in nanolaminates with 2 nm ZnO single layer thickness due to fully depleted region in small crystalline grains (<2 nm). The improved room temperature photoluminescence of nanolaminates makes them prominent materials for optical biosensors ap...

[1]  J. Michler,et al.  Electrochemical growth of ZnO nanowires on atomic layer deposition coated polystyrene sphere templates , 2013 .

[2]  R. Viter,et al.  Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition , 2013, Beilstein journal of nanotechnology.

[3]  R. Viter,et al.  Synthesis of ZnO nanoneedles by thermal oxidation of Zn thin films , 2013 .

[4]  L. Miao,et al.  Ellipsometric studies of optical properties of Er-doped ZnO thin films synthesized by sol–gel method , 2013 .

[5]  P. Déjardin,et al.  Slow translocation of polynucleotides and their discrimination by α-hemolysin inside a single track-etched nanopore designed by atomic layer deposition. , 2013, Nanoscale.

[6]  P. Déjardin,et al.  Enhanced Ionic Transport Mechanism by Gramicidin A Confined Inside Nanopores Tuned by Atomic Layer Deposition , 2013 .

[7]  Robert A Norwood,et al.  Enhancement of the third-order optical nonlinearity in ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition , 2013 .

[8]  Jiecai Han,et al.  Effect of film thickness and annealing temperature on the structural and optical properties of ZnO thin films deposited on sapphire (0001) substrates by sol–gel , 2013 .

[9]  P. Cabarrocas,et al.  Microstructural, optical and electrical properties of annealed ZnO:Al thin films , 2013 .

[10]  A. Terzis,et al.  Optical susceptibilities in singly charged ZnO colloidal quantum dots embedded in different dielectric matrices , 2013 .

[11]  I. Yun,et al.  Spectroscopic ellipsometry modeling of ZnO thin films with various O2 partial pressures , 2012 .

[12]  H. Chae,et al.  Optimization of Al2O3/ZrO2 nanolaminate structure for thin-film encapsulation of OLEDs , 2012 .

[13]  Yingfeng Li,et al.  Violet–blue–green emission and shift in Mg-doped ZnO films with different ratios of oxygen to argon gas flow , 2012 .

[14]  J. Bernède,et al.  Effect of different dopant elements (Al, Mg and Ni) on microstructural, optical and electrochemical properties of ZnO thin films deposited by spray pyrolysis (SP) , 2012 .

[15]  R. Raghavan,et al.  Nanocrystalline-to-amorphous transition in nanolaminates grown by low temperature atomic layer deposition and related mechanical properties , 2012 .

[16]  I. Bársony,et al.  Structure and morphology of aluminium doped Zinc-oxide layers prepared by atomic layer deposition , 2012 .

[17]  Ajaya K. Sigdel,et al.  Oriented Growth of Al2O3:ZnO Nanolaminates for Use as Electron‐Selective Electrodes in Inverted Polymer Solar Cells , 2012 .

[18]  Nicola Pinna,et al.  Atomic Layer Deposition of Nanostructured Materials for Energy and Environmental Applications , 2012, Advanced materials.

[19]  Hao Wu,et al.  Growth, optical, and electrical properties of nonpolar m-plane ZnO on p-Si substrates with Al2O3 buffer layers , 2012 .

[20]  H. Nagabhushana,et al.  Combustion synthesis, characterization and Raman studies of ZnO nanopowders. , 2011, Spectrochimica acta. Part A, Molecular and biomolecular spectroscopy.

[21]  H. Salamati,et al.  Microstructure and optical properties of ZnO nanoparticles prepared by a simple method , 2011 .

[22]  N. Gibson,et al.  The Scherrer equation versus the 'Debye-Scherrer equation'. , 2011, Nature nanotechnology.

[23]  A. C. Bose,et al.  Absorption–emission study of hydrothermally grown Al:ZnO nanostructures , 2011 .

[24]  David-Wei Zhang,et al.  Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition , 2011 .

[25]  J. Martínez‐Pastor,et al.  Energy of excitons and acceptor–exciton complexes to explain the origin of ultraviolet photoluminescence in ZnO quantum dots embedded in a SiO2 matrix , 2011 .

[26]  W. Mai,et al.  Novel blue-violet photoluminescence from sputtered ZnO thin films , 2011 .

[27]  Guowei Yang,et al.  Great blue-shift of luminescence of ZnO nanoparticle array constructed from ZnO quantum dots , 2011, Nanoscale Research Letters.

[28]  K. Kanaori,et al.  UV luminescent organic-capped ZnO quantum dots synthesized by alkoxide hydrolysis with dilute water. , 2011, Journal of colloid and interface science.

[29]  R. Schneider,et al.  Ultraviolet photoluminescence of ZnO quantum dots sputtered at room-temperature. , 2011, Optics express.

[30]  Won-Jae Lee,et al.  Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films , 2010 .

[31]  N. Dasgupta,et al.  Atomic Layer Deposition of Al-doped ZnO Films: Effect of Grain Orientation on Conductivity , 2010 .

[32]  I. Dékány,et al.  Size-dependent photoluminescence properties of bare ZnO and polyethylene imine stabilized ZnO nanoparticles and their Langmuir-Blodgett films , 2010 .

[33]  C. Wolden,et al.  Pulsed plasma-enhanced chemical vapor deposition of Al 2O 3TiO 2 nanolaminates , 2010 .

[34]  Magnus Willander,et al.  Luminescence from Zinc Oxide Nanostructures and Polymers and their Hybrid Devices , 2010, Materials.

[35]  S. Jaziri,et al.  Optical properties of exciton confinement in spherical zno quantum dots embedded in matrix , 2009 .

[36]  Rongjun Zhang,et al.  Optical Properties of Zinc-oxide Films Determined UsingSpectroscopic Ellipsometry with Various Dispersion Models , 2009 .

[37]  Yip-Wah Chung,et al.  Synthesis and characterization of hardness-enhanced multilayer oxide films for high-temperature applications , 2008 .

[38]  R. Yakimova,et al.  Investigation of ZnO as a perspective material for photonics , 2008 .

[39]  Yu Hang Leung,et al.  Optical properties of ZnO nanostructures. , 2006, Small.

[40]  X. Zu,et al.  Effects of Al doping concentration on optical parameters of ZnO:Al thin films by sol gel technique , 2006 .

[41]  J. Huang,et al.  Dependences of the Al thickness and annealing temperature on the structural, optical and electrical properties in ZnO/Al multilayers , 2006 .

[42]  H. Morkoç,et al.  A COMPREHENSIVE REVIEW OF ZNO MATERIALS AND DEVICES , 2005 .

[43]  Xueqin Liu,et al.  Influence of post-annealing treatment on the structure properties of ZnO films , 2005 .

[44]  Steven M. George,et al.  Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques , 2003 .

[45]  X. Hao,et al.  Violet luminescence emitted from ZnO films deposited on Si substrate by rf magnetron sputtering , 2002 .

[46]  Steven M. George,et al.  ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements , 2002 .

[47]  Sang Hyuck Bae,et al.  Relationship between photoluminescence and electrical properties of ZnO thin films grown by pulsed laser deposition , 2001 .

[48]  Jon Opsal,et al.  Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry , 1998 .

[49]  Collins,et al.  Evolution of the optical functions of thin-film aluminum: A real-time spectroscopic ellipsometry study. , 1993, Physical review. B, Condensed matter.

[50]  S. Mohan,et al.  Optical properties of ion assisted deposited zirconia thin films , 1992 .

[51]  A. S. Barker.  Infrared Lattice Vibrations and Dielectric Dispersion in Corundum , 1963 .

[52]  P. Iyer,et al.  High-yield chemical synthesis of hexagonal ZnO nanoparticles and nanorods with excellent optical properties. , 2012, Journal of nanoscience and nanotechnology.

[53]  Saliha Ilican,et al.  The determination of the optical band and optical constants of non-crystalline and crystalline ZnO thin films deposited by spray pyrolysis , 2007 .

[54]  J. Willis,et al.  On improving the Hashin-Shtrikman bounds for the effective properties of three-phase composite media , 1995 .