Celebration of the tenth transducers conference: The past, present and future of transducer research and development

The aim of this paper is threefold. First, to chronicle the development of the silicon sensor field over the last few decades by briefly discussing the early devices, the technologies, their inventors and the publication dates of their inventions. Second, to provide an overview and an anecdotal history of international Transducers conferences. Third, to predict how silicon sensors and sensor systems might develop in the near future.

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[27]  Wen H. Ko,et al.  Capacitive pressure transducers with integrated circuits , 1983 .

[28]  Richard S. Muller,et al.  TRANSDUCER ACTION IN A METAL‐INSULATOR‐PIEZOELECTRIC‐SEMICONDUCTOR TRIODE , 1965 .

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[31]  L.M. Roylance,et al.  A batch-fabricated silicon accelerometer , 1979, IEEE Transactions on Electron Devices.

[32]  P. W. Chapman,et al.  Silicon Diffused-Element Piezoresistive Diaphragms , 1962 .

[33]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[34]  Susumu Sugiyama,et al.  Integrated piezoresistive pressure sensor with both voltage and frequency output , 1983 .

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[39]  P. Sarro Integrated silicon thermopile infrared detectors , 1987 .

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[45]  G.C.M. Meijer A low-power easy-to-calibrate temperature transducer , 1982, IEEE Journal of Solid-State Circuits.