论文信息 - An IC piezoresistive pressure sensor for biomedical instrumentation

An IC piezoresistive pressure sensor for biomedical instrumentation

A thin-diaphragm diffused piezoresistive pressure sensor has been developed for biomedical instrumentation using monolithic IC techniques. Anisotropic etching affords large-area, 5μ thick diaphragms with high yield, and simple temperature compensation eliminates residual temperature drift.

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