论文信息 - Observation of local SIMOX layers by microprobe RBS - 字舞流文

Observation of local SIMOX layers by microprobe RBS

T. Lohner | H. Ryssel | M. Takai | M. Kiuchi | A. Chayahara | K. Fujii | Y. Mokuno | A. Kinomura | R. Schork | Y. Horino