Slide Film Damping And Squeeze Film Damping Models Considering Gas Rarefaction Effects For Mems Devices

Slide and squeeze film damping models play important role in the dynamics of the micro-electro-mechanical systems (MEMS) devices as they are important design parameters, which significantly affect the frequency-domain behavior and the quality factor (Q-factor) of the vibrating MEMS devices for both lateral and vertical motions. For ensuring the accuracy of the damping models, gas rarefaction effects was considered thoroughly by introducing an effective viscosity (ηeff) into our models. As the effective viscosity of the gas is a key parameter of our damping models, it is very important to approximate the parameter with the measurement data using the Simulated Annealing (SA) algorithm. Our results show that the discrepancies of both the slide and squeeze film dampings are less than 0.26% with the measurement data for an applied pressure (pa<0.1 Pa), and less than 0.33% for an applied pressure (1 Pa≤pa≤50 Pa).