论文信息 - Plasma cleaning and activation of silicon surface in Dielectric Coplanar Surface Barrier Discharge - 字舞流文

Plasma cleaning and activation of silicon surface in Dielectric Coplanar Surface Barrier Discharge

J. Havel | M. Cernak | P. Sťahel | M. Stupavská | D. Skácelová | Martin Haničinec | A. Pamreddy | M. Černák | Martin Hanicinec