Recent Development of Micromachined Biosensors

The aim of this paper is to provide a panoramic view of recent advancements for the micromachined biosensors. In terms of different sensing principles, three categories of biosensors that have attracted much attention in recent decade are reviewed, which are electrochemical biosensors, microcantilever biosensors, and dielectric spectroscopic biosensors. Each type of biosensors has certain advantages and weaknesses, for example electrochemical biosensors can be easily integrated with readout circuits as they directly output electronic signals; microcantilever based biosensors are a label free sensing technique; dielectric spectroscopic biosensors provide a truly non-invasive sensing technique. All of above sensing techniques are compared in this paper based on previous published literatures. This paper will serve as a useful resource to help biosensor designers choose the most appropriate technology to meet their requirements.

[1]  B. Bocquet,et al.  Planar excitation of Goubau Transmission Lines for THz BioMEMS , 2005, IEEE Microwave and Wireless Components Letters.

[2]  J. Kong,et al.  Immunoassays based on microelectrodes arrayed on a silicon chip for high throughput screening of liver fibrosis markers in human serum. , 2006, Biosensors & bioelectronics.

[3]  Lydia L. Sohn,et al.  Dielectric spectroscopy for bioanalysis: From 40 Hz to 26.5 GHz in a microfabricated wave guide , 2001 .

[4]  Nader Jalili,et al.  Non-linear vibrations and frequency response analysis of piezoelectrically driven microcantilevers , 2007 .

[5]  K. Jaruwongrungsee,et al.  Symmetrical PolyMUMPs-Based Piezoresistive Microcantilever Sensors With On-Chip Temperature Compensation for Microfluidics Applications , 2008, IEEE Sensors Journal.

[6]  J. Bausells,et al.  Silicon microcantilevers with MOSFET detection , 2010 .

[7]  Deepak Uttamchandani,et al.  Flip-Chip Distributed MEMS Transmission Lines (DMTLs) for Biosensing Applications , 2009, IEEE Transactions on Industrial Electronics.

[8]  David Dubuc,et al.  Millimeter wave carbon nanotube gas sensor , 2007 .

[9]  T. Thundat,et al.  Bioassay of prostate-specific antigen (PSA) using microcantilevers , 2001, Nature Biotechnology.

[10]  Ping Gong,et al.  Real-time, multiplexed electrochemical DNA detection using an active complementary metal-oxide-semiconductor biosensor array with integrated sensor electronics. , 2009, Biosensors & bioelectronics.

[11]  Yosi Shacham-Diamand,et al.  Electrochemical detection of biological reactions using a novel nano-bio-chip array , 2006 .

[12]  Shih-Ming Yang,et al.  On the temperature compensation of parallel piezoresistive microcantilevers in CMOS biosensor , 2008 .

[13]  T. Thundat,et al.  Glucose biosensing using an enzyme-coated microcantilever , 2002 .

[14]  Shih-Ming Yang,et al.  A piezoresistive bridge-microcantilever biosensor by CMOS process for surface stress measurement , 2010 .

[15]  Stefano Bianco,et al.  Development of microcantilever-based biosensor array to detect Angiopoietin-1, a marker of tumor angiogenesis. , 2010, Biosensors & bioelectronics.

[16]  Kwang-Cheol Lee,et al.  An electrochemical impedance biosensor with aptamer-modified pyrolyzed carbon electrode for label-free protein detection , 2008 .

[17]  Joseph Wang,et al.  Electrochemical biosensors: towards point-of-care cancer diagnostics. , 2006, Biosensors & bioelectronics.

[18]  H. Muguruma.  Plasma-polymerized films for biosensors , 1999 .

[19]  Lawrence Kulinsky,et al.  Carbon post-microarrays for glucose sensors. , 2008, Biosensors & bioelectronics.

[20]  D. Uttamchandani,et al.  A Microwave Dielectric Biosensor Based on Suspended Distributed MEMS Transmission Lines , 2009, IEEE Sensors Journal.

[21]  Nader Pourmand,et al.  Crosstalk in Integrated Microarrays With Current Sensing , 2008, IEEE Transactions on Circuits and Systems I: Regular Papers.

[22]  Bradley A. Minch,et al.  Design of a CMOS Potentiostat Circuit for Electrochemical Detector Arrays , 2007, IEEE Transactions on Circuits and Systems I: Regular Papers.

[23]  E. Lester,et al.  A system for traceable measurement of the microwave complex permittivity of liquids at high pressures and temperatures , 2009 .

[24]  Baohong Liu,et al.  Multianalyte immunoassay based on insulating-controllable PoPD film at arrayed electrodes integrated on a silicon chip. , 2007, Biosensors & bioelectronics.

[25]  Tae Song Kim,et al.  Detection of Hepatitis B Virus (HBV) DNA at femtomolar concentrations using a silica nanoparticle-enhanced microcantilever sensor. , 2009, Biosensors & bioelectronics.

[26]  Stephan T. Koev,et al.  Interferometric readout of multiple cantilever sensors in liquid samples , 2010 .

[27]  Shih-Hsun Yin.  A NOVEL TECHNIQUE FOR MASS DETECTION OF A PIEZOELECTRIC CANTILEVER USING ACTIVE BIFURCATIONS , 2010 .

[28]  Ruifeng Yue,et al.  Design and optimization of laminated piezoresistive microcantilever sensors , 2005 .

[29]  W.P. King,et al.  Modeling Piezoresistive Microcantilever Sensor Response to Surface Stress for Biochemical Sensors , 2008, IEEE Sensors Journal.

[30]  R. Clarke,et al.  A review of RF and microwave techniques for dielectric measurements on polar liquids , 2006, IEEE Transactions on Dielectrics and Electrical Insulation.

[31]  Kiejin Lee,et al.  Microwave dielectric resonator biosensor for aqueous glucose solution. , 2008, The Review of scientific instruments.

[32]  T. Lee,et al.  A Programmable 0.18-$\mu\hbox{m}$ CMOS Electrochemical Sensor Microarray for Biomolecular Detection , 2006, IEEE Sensors Journal.

[33]  Chongdu Cho,et al.  Deflection, Frequency, and Stress Characteristics of Rectangular, Triangular, and Step Profile Microcantilevers for Biosensors , 2009, Sensors.

[34]  S S Stuchly,et al.  Microwave coplanar sensors for dielectric measurements , 1998 .

[35]  M. Grattarola,et al.  Micromechanical cantilever-based biosensors , 2001 .

[36]  Michael Schivo,et al.  Chemically Polymerized Polypyrrole for On-Chip Concentration of Volatile Breath Metabolites. , 2010, Sensors and actuators. B, Chemical.

[37]  Tae Song Kim,et al.  In situ real-time monitoring of biomolecular interactions based on resonating microcantilevers immersed in a viscous fluid , 2007 .

[38]  Il-Hoon Cho,et al.  Label-free protein assay with site-directly immobilized antibody using self-actuating PZT cantilever , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[39]  Andrew Cleland,et al.  High-bandwidth radio frequency Coulter counter , 2005 .

[40]  Lijie Li.  SIMULTANEOUS DETECTION OF ORGANIC AND INORGANIC SUBSTANCES IN A MIXED AQUEOUS SOLUTION USING A MICROWAVE DIELECTRIC SENSOR , 2010 .

[41]  A. Griol,et al.  Enhancement of Sensitivity of Microwave Planar Sensors With EBG Structures , 2006, IEEE Sensors Journal.

[42]  K.L. Shepard,et al.  Active CMOS Sensor Array for Electrochemical Biomolecular Detection , 2008, IEEE Journal of Solid-State Circuits.

[43]  Jaume Esteve,et al.  Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography , 2004 .

[44]  Liling Fu,et al.  Resonance behavior of magnetostrictive micro/milli-cantilever and its application as a biosensor , 2009 .

[45]  Konstantinos Misiakos,et al.  Electrochemical biosensor microarray functionalized by means of biomolecule friendly photolithography. , 2010, Biosensors & bioelectronics.

[46]  Yosi Shacham-Diamand,et al.  A whole cell electrochemical biosensor for water genotoxicity bio-detection , 2009 .

[47]  Shekhar Bhansali,et al.  Sensitive estimation of total cholesterol in blood using Au nanowires based micro-fluidic platform. , 2007, Biosensors & bioelectronics.

[48]  Alexander A. Barannik,et al.  High sensitivity microwave characterization of organic molecule solutions of nanoliter volume , 2009 .

[49]  P. Gros,et al.  A miniaturised silicon based enzymatic biosensor: towards a generic structure and technology for multi-analytes assays , 2002 .

[50]  Andreas Offenhäusser,et al.  Novel post‐process for the passivation of a CMOS biosensor , 2008 .

[51]  Yong-Jun Kim,et al.  A novel relative humidity sensor based on microwave resonators and a customized polymeric film , 2006 .

[52]  Natalya Tokranova,et al.  A living cell-based biosensor utilizing G-protein coupled receptors: principles and detection methods. , 2007, Biosensors & bioelectronics.

[54]  Chongdu Cho,et al.  A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors , 2008, Sensors.

[55]  Nader Jalili,et al.  Nonlinear vibrations of piezoelectric microcantilevers for biologically-induced surface stress sensing , 2008 .