论文信息 - Study of CMOS THz pixels using different antenna geometries on metamaterial structures and in-pixel high-performances signal processing

Study of CMOS THz pixels using different antenna geometries on metamaterial structures and in-pixel high-performances signal processing

A study of different pixel implementations working around 300 GHz is presented. They are monolithically integrated in a standard low-cost CMOS process with a high performances read-out chain for signal processing. All the different pixel configurations are compliant with the integrated metal stack and the imposed density rules of the technology. A test-chip, composed of a total of 17 cases of study, will be evaluated including a matrix of 9×9 pixels allowing real-time imaging. Significant improvement has been made on the detector, thanks to antenna/nMOSFET co-design, and on the signal processing chain. A S11 of −18.2 dB with 5.8-dBi gain and a radiated front-to-back ratio of 10.1 dB are achieved regarding integrated antenna performances.

[1] M. Shur,et al. Detection, mixing, and frequency multiplication of terahertz radiation by two-dimensional electronic fluid , 1996 .

[2] Matteo Perenzoni,et al. Design of an efficient 900 GHz antenna in standard CMOS technology for imaging arrays , 2015, 2015 9th European Conference on Antennas and Propagation (EuCAP).

[3] J. Grzyb,et al. On the co-design between on-chip antennas and THz MOSFET direct detectors in CMOS technology , 2012, 2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves.

[4] Christian Enz,et al. A Low-Noise CMOS THz Imager Based on Source Modulation and an In-Pixel High-Q Passive Switched-Capacitor N-Path Filter , 2016, Sensors.