25Gbps × 4ch photodiode array with high responsivity for 100Gbps Ethernet

Four-channel surface-illuminated photodiodes monolithically integrated in one array chip are fabricated for 100Gbps Ethernet. The photodiode with an optimized distributed Bragg reflector has a 3dB bandwidth of 25GHz and the highest responsivity of 0.92A/W at a 1.3µm wavelength.